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Nonlinearity analysis of piezoelectric micromachined ultrasonic transducers based on couple stress theory
piezoelectric micromachined ultrasonic transducer (pMUT) couple stress theory static deformation Nonlinearity analysis
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2012/2/24
This paper studies the static deformation behavior of a piezoelectric micromachined ultrasonic transducer (PMUT) actuated by a strong external electric field. The transducer membrane consists of a pie...