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Combination of Thick-Film Dielectric/Thin Film Conductor for Fine Pattern Formation of Multi-Layer Substrate
Thick-Film Dielectric/Thin Film Conductor Fine Pattern Formation Multi-Layer Substrate
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2010/12/28
Presented in this paper is a realization of Multi-Layer Substrate with 30 μm signal pattern width and 100 μm square via holes on a 100 mm square ceramic substrate. To obtain this fine signal pattern w...