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搜索结果: 1-6 共查到RF plasma相关记录6条 . 查询时间(0.062 秒)
We present results of a fabrication-process development for the lithographic pattern transfer into the nm100sub range by combining electron-beam lithography and reactive dry etching to obtain ...
Design and Characterization of an RF Plasma Cleaner     RF discharge  plasma cleaner  Langmuir probe       font style='font-size:12px;'> 2010/6/30
The design and characterization of an innovative device for plasma cleaning, based upon a non-conventional radio-frequency discharge, is described. The RF fields are produced by an antenna placed insi...
Carbon Coated Nanoparticle Composites Synthesized in an RF PLasma Torch, in Nanostructured Materials.
Experimental observations and nucleation and growth theory of polyhedral magnetic ferrite nanoparticles synthesized using an RF plasma torch.
To provide information on the conversion of methane in a non-catalyzed radio-frequency (RF) plasma system into valuable chemicals, such as HCHO, CH3OH, C2H6, C2H4 and C2H2, an experiment was conduct...
The direct conversion of methane (CH4) into methanol (CH3OH) and HCHO in an Argon (Ar) 50W radio-frequency plasma system was applied and the effects of various feed compositions, CH4/O2 ratio, and p...

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