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Improvement of temperature uniformity in rapid thermal processing systems using multivariable control
Temperature uniformity rapid heat treatment system a semiconductor chip the chip temperature distribution the chip
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2015/8/12
During rapid thermal processing (RTP) of a semiconductor wafer, maintenance of near-uniform wafer temperature distribution is necessary. This paper addresses the problem of insuring temperature unifor...
A Computerized Procedure for Estimating Chemical Changes in Thermal Processing Systems
Chemical Changes Thermal Processing Systems
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2008/11/27
Chemical changes caused by heating in a continuous flow, helically coiled tube indirect UHT process system were evaluated and compared to a non-flow, vat process system. On the basis of known formulas...
A Computerized Procedure for Estimating Chemical Changes in Thermal Processing Systems
Estimating Chemical Changes Thermal Processing Systems
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2016/5/31
Chemical changes caused by heating in a continuous flow, helically coiled tube indirect UHT process system were evaluated and compared to a non-flow, vat process system. On the basis of known formulas...